| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a recessed or projected figure having an almost perpendicular wall face to a substrate. <P>SOLUTION: In the process of exposing a photosensitive resin layer to parallel light beams via a microlens so as to harden into a recessed and projected figure having an almost perpendicular wall face to the photosensitive resin layer, the exposure light quantity is discontinuously increased from a part 42 to be formed into a recess to a part 41 to be formed into a projection, and moreover, the exposure light quantity Iy in a part to be formed into the edge 41a of the projection is controlled to be larger than the light quantity Iz in a part to be the center 41b of the projection. As the exposure light quantity drastically changes inside and outside the wall face of the recess and projection, the wall face is made almost perpendicular. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
