| 发明名称 |
COBALT-OXIDE-BASED CRYSTAL BODY WITH LAYERED STRUCTURE, AND MANUFACTURING METHOD THEREFOR |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a cobalt-oxide-based single crystal thin film with a layered structure, which is useful for a magnetometric sensor or a GMR. SOLUTION: This manufacturing method comprises mounting a substrate 13 formed of an oxide-based crystal body with a layered structure expressed by A<SB>2</SB>BO<SB>4</SB>such as LaSrAlO<SB>4</SB>, beneath the undersurface of a substrate holder 12 in a vacuum chamber 11, and mounting a target 14 having a composition of La<SB>2-x</SB>Sr<SB>x</SB>CoO<SB>4</SB>(1.5<x≤2) so as to oppose the substrate 13. The target 14 is irradiated with a laser beam emitted from a laser source 17 through a beam-condensing unit 16 and a light introduction window 15. Thereby, the single crystal thin film with a composition of La<SB>2-x</SB>Sr<SB>x</SB>CoO<SB>4</SB>is formed on the substrate 13. COPYRIGHT: (C)2005,JPO&NCIPI
|
| 申请公布号 |
JP2005054222(A) |
申请公布日期 |
2005.03.03 |
| 申请号 |
JP20030284881 |
申请日期 |
2003.08.01 |
| 申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY |
发明人 |
MATSUNO TAKEO;KAWASAKI MASASHI;TOKURA YOSHINORI |
| 分类号 |
C01G51/00;C23C14/08;C30B29/22;H01F10/16;H01F10/32;H01F41/18;H01F41/26;H01F41/30;H01L43/08;H01L43/10;(IPC1-7):C23C14/08 |
主分类号 |
C01G51/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
