Particle-free polishing fluid for nickel-based coating planarization

摘要

A particle-free polishing fluid for planarizing nickel or nickel-alloy coating on substrates is disclosed. The particle-free polishing fluid contains at least one oxidizing agent, or mixtures thereof. The particle-free polishing fluid may also contain an accelerating agent and/or a complexing agent. Surface roughnesses of less than about 1.51 Å are possible when polishing magnetic disks with the particle-free polishing fluid in a final step polishing process.