| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a mask case for accommodating and carrying the mask whose surface contamination is suppressed. <P>SOLUTION: The mask case is formed of a first member 6 and a second member 7 which will become a cover and a tray respectively comprising therein a holding body 5 to place a photomask 1. In this mask case, the first member 6 and the second member 7 are formed of the material which is covered at the internal side thereof with a light electrolyte function film to transmit the visible light beam and ultraviolet light beam. Moreover, the holding body 5, first member 6, and the second member 7 are the mask cases formed of a substance including less amount of out-gas. In addition, in this mask case, at least the holding body 5 is in contact with only the angled portion of a mask substrate 1. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
