CRUCIBLE USED IN SOURCES OF MOLECULAR BEAM FOR DEPOSITING THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a crucible 10 that is hard to be broken with repetitious usages by preventing so-called the creeping-up phenomenon where the film material(a) creeps up along with the inner wall of the crucible 10 when the film material(a) is heated, melted and evaporated. SOLUTION: A crystalline silicon carbide with poor wetting properties to the melted film material(a) is used without using a metal material having high affinity with the film material(a) such as aluminum as the material of the crucible 10. An inorganic ceramic material is also used as the material of the crucible 10. The crystal axis is oriented to the vertical direction to the wall face. Thus, the film material is hard to develop to the face direction of the wall body of the crucible 10. COPYRIGHT: (C)2005,JPO&NCIPI