发明名称 ANTISTATIC SAMPLE BASE
摘要 PROBLEM TO BE SOLVED: To provide an antistatic sample base capable of performing a measurement by a scanning probe microscope without using a complicated static eliminating measure, contaminating a sample, or being influenced by static electricity. SOLUTION: This antistatic sample base for retaining a scanning probe microscopic sample comprises a sample base lower part 11A and a sample base upper part 11B. The sample base lower part 11A is a circular or polygonal sheet-like base, and the sample base upper part 11B comprises a circular or polygonal flat plate having a recessed part 4 for placing the sample. The recessed part 4 has a surface substantially parallel to the plate surface, and an opening part 5 enabling the scanning on the sample surface of a scanning probe is provided in the vicinity of the center of the substantially parallel surface. The sample base upper part 11B and the sample base lower part 11A are formed of a metallic or conductive material. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005055388(A) 申请公布日期 2005.03.03
申请号 JP20030288644 申请日期 2003.08.07
申请人 NEC TOKIN CORP 发明人 YOSHIKAWA HIDEYUKI
分类号 G01Q30/08;G01Q30/18;G01Q30/20;(IPC1-7):G01N13/10 主分类号 G01Q30/08
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