| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning type plane shape measuring device which takes highly accurate surface shape measurement of a large-size inspection surface by using an interferometer having a small observation region by reducing the influence of a movement error in scanning. SOLUTION: In order to correct partial surface shapes S1-S5 (image data on each measuring position P1-P5) of the inspection surface 4a including the error quantity corresponding to the movement error of a measuring head 1, a virtual inspection surface shape Sv passing positions P<SB>31</SB>, P<SB>32</SB>(=P3), P<SB>33</SB>corresponding respectively to height data h<SB>31</SB>, h<SB>32</SB>, h<SB>33</SB>is calculated from the height data h<SB>31</SB>, h<SB>33</SB>acquired by each distance sensor 12 on one measuring position P3 and from the height data h<SB>32</SB>acquired from the image data on the measuring position P3. The inspection surface shape is calculated by connecting the partial surface shapes S1-S5 respectively according to the calculated virtual inspection surface shape Sv. COPYRIGHT: (C)2005,JPO&NCIPI
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