METHOD AND DEVICE FOR INSPECTING CIRCUIT BOARD

摘要

PROBLEM TO BE SOLVED: To enable the precise and short-time inspection of a circuit board of an inspection object. SOLUTION: An electric parameter between a probe 3 brought into a portion insulated to each conductor pattern Ps and an inner layer beta pattern Pc in the vicinity of a conductor pattern Pax is measured as a first measurement value. The probe 3 is brought into contact with the conductor pattern Pax and an electric parameter between the probe 3 and the inner layer beta pattern Pc is measured as a second measurement value. The difference value between the measured second and first measurement values is calculated, and compared with a corresponding reference value to inspect the quality of the conductor pattern Pax. COPYRIGHT: (C)2005,JPO&NCIPI