| 摘要 |
PROBLEM TO BE SOLVED: To provide a leaked gas detector that can stably and appropriately evaluate and judge the amount of leaked gas and can efficiently inspect works whose shape and size differ. SOLUTION: The leaked gas detector 10 comprises a chamber 11 for retaining a body W to be inspected, where the opening is subjected to sealing treatment, in the inside; a tracer gas supply section 12 that is placed on a base 11a in the sealed space of the chamber 11, whose tip is connected to a tracer gas introduction section A of the body W to be inspected, and supplies tracer gas to the body W to be inspected; a gas circulation section 13 for circulating gas around the body W to be inspected via a gas suction opening 11b and a gas discharge opening 11c provided at the chamber 11; and a gas detection section 14 for measuring the concentration of the tracer gas in circulation gas. COPYRIGHT: (C)2005,JPO&NCIPI
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