METHOD AND APPARATUS FOR MANUFACTURING BASE MATERIAL WITH THIN FILM DEPOSITED THEREON

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing a base material with a metal thin film capable of reducing heat affection occurring on the surface of the base material traveling along a cooling can while performing film deposition by performing vapor deposition of the metal thin film on the surface of the base material. SOLUTION: In the method for manufacturing a base material with a thin film containing metal vapor-deposited on the surface of the base material while allowing the base material to travel along a cooling surface in a vacuum atmosphere, gas to be bond-reactive with the metal is interposed between the base material and the cooling surface. COPYRIGHT: (C)2005,JPO&NCIPI