| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for conveying glass substrates for reducing the staff, a labor cost and a running cost, eliminating influence on the substrates and reducing a delivery space of a factory. SOLUTION: The method for conveying the glass substrates from a factory A to a factory B comprises a process of opening a door 4 of a glass substrate cassette transfer station 5 disposed in the factory A, to move the glass substrate cassette 1 to the glass substrate cassette transfer station 5; a process of closing the door 4; a process of bringing an exclusive box 6 for holding the glass substrate cassette 1, into airtight close contact with a door 13 of the glass substrate cassette transfer station 5; a process of opening the door 13 and an automatic door 11 of the exclusive box 6 to hold the glass substrate cassette 1 in the exclusive box 6; and a process of closing the door 13 and automatic door 11. COPYRIGHT: (C)2005,JPO&NCIPI
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