| 摘要 |
An electromechanical resonator includes a substrate (150, 450), an anchor (110, 510, 810) coupled to the substrate, a beam (120, 620, 1020, 1120, 1220, 1420) coupled to the anchor and suspended over the substrate, and a drive electrode (130, 435, 630, 930, 933, 935, 1030, 1035, 1130, 1135, 1435) coupled to the substrate and separated from the beam by a gap (140, 445, 640, 1040, 1045, 1140, 1145, 1445). The beam has a first surface (321, 621, 1021, 1121), a second surface (322, 622), and a third surface (323, 623, 1023, 1123, 1223, 1423). The first surface defines a width and a height, the second surface defines the height and a length, and the third surface defines the length and the width. The width, height, and length are substantially mutually perpendicular, and the beam resonates substantially only in compression mode and substantially only along an axis defined by the length.
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