摘要 |
A windowed chamber, e.g., a semiconductor manufacturing process chamber such as a scrubber, deposition chamber, thermal reactor, or the like, including a port with a radiation-transmissive window therein. Interiorly disposed within the chamber is (i) a disposable film on an interior surface of the window and/or (ii) a colorimetric medium disposed in viewable relationship to the window, so that a colorimetric change is perceivable through the window, e.g., visually or by optical sensing device, when the colorimetric medium is exposed to target gas species. Also disclosed is a gas detection article including a polymeric material that is colorimetrically responsive to the presence of at least one target gas species, in exposure thereto. |
申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC.;MARGANSKI, PAUL, J.;SWEENEY, JOSEPH, D.;TOM, GLENN, M.;ARNO, JOSE, I.;BAUM, THOMAS, H.;ROEDER, JEFFREY, F.;HILLS, JAMES, R. |
发明人 |
MARGANSKI, PAUL, J.;SWEENEY, JOSEPH, D.;TOM, GLENN, M.;ARNO, JOSE, I.;BAUM, THOMAS, H.;ROEDER, JEFFREY, F.;HILLS, JAMES, R. |