| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a calculation method of an image fluctuation for automatically and quantitatively determining the fluctuation of an image from image data. <P>SOLUTION: Image data on a specimen having the straight line edge are acquired; an edge position of the specimen corresponding to a picture element in the direction along an edge image S<SB>1</SB>is estimated: and dislocation quantity of the straight line edge is determined on the basis of this edge position, for resolving the problem. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
