| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new fluorine-containing polymerizable unsaturated monomer useful for obtaining a polymer having high transparency to a light of a wavelength not more than 300 nm, especially of vacuum ultraviolet light such as F<SB>2</SB>excimer laser (157 nm) etc. <P>SOLUTION: The fluorine-containing polymerizable unsaturated monomer is represented by formula (1a) or (1b), wherein rings Z<SP>1</SP>and Z<SP>2</SP>show each an alicyclic carbon ring; R<SP>1</SP>, R<SP>2</SP>and R<SP>3</SP>show each an alkyl group or a fluoroalkyl group; W shows a single bond or a linking group; R shows a specified unsaturated acyl group; provided that, in formula (1a), at least one of R<SP>1</SP>and R<SP>2</SP>etc., is a fluorine atom or a fluoroalkyl group and, in formula (1b), (i) a fluorine atom or a fluoroalkyl group is bound with the ring Z<SP>2</SP>or (ii) R<SP>3</SP>is a fluoroalkyl group. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
