发明名称 |
Common optical-path testing of high-numerical-aperture wavefronts |
摘要 |
A polarizing point-diffraction plate is used to produce common-path test and reference wavefronts with mutually orthogonal polarizations from an input wavefront. The common-path test and reference wavefronts are collimated, phase shifted and interfered, and the resulting interferograms are imaged on a detector. The interference patterns are then processed using conventional algorithms to characterize the input light wavefront.
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申请公布号 |
US2005046863(A1) |
申请公布日期 |
2005.03.03 |
申请号 |
US20030652903 |
申请日期 |
2003.08.29 |
申请人 |
MILLERD JAMES E.;BROCK NEAL J.;HAYES JOHN B.;WYANT JAMES C. |
发明人 |
MILLERD JAMES E.;BROCK NEAL J.;HAYES JOHN B.;WYANT JAMES C. |
分类号 |
G01B9/02;G01J9/02;(IPC1-7):G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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