发明名称 LOW DIELECTRIC ORGANOSILICATE POLYMER COMPOSITE
摘要 <p>Provided are a porous organosilicate polymer composite prepared by heating an organic/inorganic hybrid polymer in which an organosilicate polymer is chemically bonded to a radial pore-forming polymer ended with a hydrolyzable alkoxysilyl group and used as a core molecule, and a semiconductor device using an organosilicate polymer composite film including the porous organosilicate polymer composite. The organosilicate polymer composite film has a very low dielectric constant, and thus, is useful as a dielectric film of the semiconductor device.</p>
申请公布号 WO2005019303(A1) 申请公布日期 2005.03.03
申请号 WO2004KR02104 申请日期 2004.08.20
申请人 POSTECH FOUNDATION;REE, MOONHOR;OH, WEONTAE;HWANG, YONG-TAEK;LEE, BYEONGDU 发明人 REE, MOONHOR;OH, WEONTAE;HWANG, YONG-TAEK;LEE, BYEONGDU
分类号 H01L21/312;C08G65/32;C08G77/42;C08L83/10;(IPC1-7):C08G65/32;H01L21/31;H01L23/58 主分类号 H01L21/312
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