| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate storage case capable of reducing pollution of a substrate stored in the case without gas or the like generated from the case, and maintaining excellent conservation-stability of chemically amplified resist (CAR) which is highly-sensitized in recent years. SOLUTION: In the substrate storage case formed of at least raw resin, the amount of acid eluded from the raw resin is≤2.4×10<SP>-8</SP>mol/g or≤2,000 ppbw. COPYRIGHT: (C)2005,JPO&NCIPI |
