POWER SUPPLY UNIT, SEMICONDUCTOR MANUFACTURING APPARATUS AND MACHINE TOOL

摘要

PROBLEM TO BE SOLVED: To provide a power supply unit capable of obtaining a stable output without being adversely affected by a drop of a voltage inputted from a power supply unit, in power supply in which the supply of driving power with a semiconductor manufacturing apparatus or the like illustrated as an example is required to be taken into account. SOLUTION: This power supply unit includes a rectification circuit 3 for outputting a first DC voltage by rectifying alternating current to be inputted and a smoothing circuit 5. Further, the unit comprises a voltage detection circuit 1 for detecting the voltage of the power supply unit, and a voltage doubler rectifier circuit 4 for outputting a second DC voltage higher than the first DC voltage. Based on the information of the presence of a voltage drop detected by the voltage detection circuit 1, the alternating current to be inputted is inputted into the rectification circuit 3 or the voltage doubler rectifier circuit 4. COPYRIGHT: (C)2005,JPO&NCIPI