发明名称 ACTUATOR APPARATUS AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To compensate displacement by a normal actuator even if a defective actuator exists, and to improve an aperture ratio and luminance when applied as a displaying device. SOLUTION: The actuator apparatus 10A comprises a driving portion 16 where a plurality of actuators 14 are arranged flat on a substrate 12, a first plate member 18 that the driving force of a plurality of actuators 14 in the driving portion 16 is transferred, and a second plate member 20 arranged opposed to the first plate member 18. A plurality of spacers 22 are formed between the first and the second plate members 18, 20, and, for example, m divisions are formed with these spacers 22. A plurality of spacers 24 are formed between the first plate member 18 and the substrate 12 and the m divisions are formed with these spacers 24. Then, n actuators are allocated for each division. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005057250(A) 申请公布日期 2005.03.03
申请号 JP20040193593 申请日期 2004.06.30
申请人 NGK INSULATORS LTD 发明人 TAKEUCHI YUKIHISA;NANATAKI TSUTOMU;KIMURA KOJI;SHIMOKAWA NATSUKI;AKAO TAKAYOSHI
分类号 G02B26/08;B81B3/00;B81B7/04;H01L41/09;H01L41/187;(IPC1-7):H01L41/09 主分类号 G02B26/08
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