发明名称 COHERENCY REDUCER HAVING A STEPPED MIRROR AND METHOD FOR PRODUCING A COHERENCY REDUCER
摘要 The invention relates to a coherency reducer having a stepped mirror element (2). Said stepped mirror element (2) has a number of bars (6), which are arranged essentially parallel to one another and which have reflective end faces (8), and the reflective end faces (8), in the longitudinal direction of the bars (6), are offset relative to one another.
申请公布号 WO2005019900(A1) 申请公布日期 2005.03.03
申请号 WO2004EP08118 申请日期 2004.07.20
申请人 CARL ZEISS SMS GMBH;MENCK, ALEXANDER 发明人 MENCK, ALEXANDER
分类号 G02B27/10;G02B27/48;G03F7/20 主分类号 G02B27/10
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