| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of inspecting a laminated piezoelectric element capable of easily and more certainly discovering defects. <P>SOLUTION: In a laminated piezoelectric element 1 constituted by alternately laminating a piezoelectric layer 11 and internal electrode layers 121, 122, defective goods are separated by monitoring a detection current which is generated by impressing a dc voltage to the laminated piezoelectric element 1 so that the internal electrode layers 121, 122 adjoining through the piezoelectric layer 11 may have different potentials. Besides, if an electric field strength at the time of impressing the dc voltage to the laminated piezoelectric element to be inspected is set to E (kV/mm), and if the detection current generated by impressing the dc current to the laminated piezoelectric element is set to X (μA), it is desirable to classify the case as the defective goods when there exist one or more peaks having a distance 0.008E or more between base lines in a wave representing a time variation of the detection current X. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
