摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermal type flowmeter capable of highly accurate measurement of a micro-flow. <P>SOLUTION: This thermal type flowmeter is equipped with a passage tube 1 wherein a fluid or the like comprising a nucleic acid such as DNA or RNA, or a protein, a micro-heater 11 for supplying heat to the fluid, the first temperature sensor 3a provided on the upstream side of the micro-heater, and the second temperature sensor 3b provided on the downstream side, and is used for measuring the flow rate of the fluid based on the temperature difference between the two temperature sensors. The micro-heater 11 is provided inside the wall of the passage tube so that the fluid is brought into contact therewith, and is constituted so that a heat radiation member 12 is provided on the fluid side surface and a heat absorption member 13 is provided on the fluid side surface of the temperature sensor. The material of the passage tube is a stainless steel or a polymer resin, and the heat radiation member may be a metal wire, and the heat absorption member may be a metal film. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |