| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetron equipped with a cathode part with an elongated life in a simple structure. SOLUTION: The cathode part 13 is structured by heating a cathode base plate 10 at 400 to 600°C in hydrocarbon system atmosphere such as methane, having the gas react on the surface of the cathode base plate 10 by a thermal CVD method, whereby, with nickel, iron or the like existing on the surface of the cathode base plate 10 as a nucleus, an electron emission source with graphite nanofiber 11 vapor-phase grown on the surface of the cathode base plate 10 is pinched by end hats 12. COPYRIGHT: (C)2005,JPO&NCIPI
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