| 摘要 |
PROBLEM TO BE SOLVED: To enhance reliability of a pulse power supply by detecting abnormal discharge (spark discharge) upon the occurrence in a discharge load, and providing an appropriate circuit so that abnormal discharge does not occur continuously. SOLUTION: The pulse power supply comprises a pulse generating circuit 20 consisting of a capacitor C0 being charged with energy from a charging power supply 10 and a switch means SW which opens to take out energy from the capacitor C0 as pulse power being fed to a discharge load 30, a control circuit 40 providing the switch means SW with a trigger signal for outputting the pulse power to the discharge load 30 at a predetermined period, and an output voltage command means 41 for providing the charging power supply 10 with an output voltage value. The pulse power supply is further provided with a spark detecting means 50 for detecting abnormal discharge occurring in the discharge load 30, and a masking means 60 receiving an output signal from the spark detecting means 50 and outputting a signal for interrupting a trigger signal being provided from the control circuit 40. COPYRIGHT: (C)2005,JPO&NCIPI
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