| 发明名称 |
Micro mirror unit and method of making the same |
| 摘要 |
A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.
|
| 申请公布号 |
US2005046980(A1) |
申请公布日期 |
2005.03.03 |
| 申请号 |
US20040962445 |
申请日期 |
2004.10.13 |
| 申请人 |
FUJITSU LIMITED;FUJITSU MEDIA DEVICES LIMITED |
发明人 |
MIZUNO YOSHIHIRO;UEDA SATOSHI;TSUBOI OSAMU;SAWAKI IPPEI;OKUDA HISAO;KOUMA NORINAO;SONEDA HIROMITSU;YAMAGISHI FUMIO |
| 分类号 |
B81B3/00;B81C1/00;G02B26/08;(IPC1-7):G02B26/08;G02F1/29;G02B7/182 |
主分类号 |
B81B3/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
