Cleaning sheet and process for cleaning substrate treatment device using same

摘要

A cleaning sheet comprising: a cleaning layer; and a protective film treated with a releasing agent comprising a silicone, the protective film being provided as a separator on at least one side of the cleaning layer, wherein an amount of silicone attached to the cleaning layer when the separator is peeled off from the cleaning layer is 0.005 g/m<2 >or less as calculated in terms of polydimethylsiloxane.