Production of optically active micro-structures, e.g. lenses, comprises mechanically forming an optically active surface topography on a substrate, masking the topography by photolithography, and smoothing by etching

摘要

#CMT# #/CMT# Production of optically active micro-structures, especially lenses, lens arrays and prisms, comprises mechanically forming an optically active surface topography on a substrate, masking the topography by photolithography, and smoothing using an etching process. #CMT#USE : #/CMT# For producing optically active micro-structures, especially lenses, lens arrays and prisms. #CMT#ADVANTAGE : #/CMT# The process can be used on an industrial scale with high precision. #CMT#ELECTRONICS : #/CMT# Preferred Features: The optically active surface topography is smoothed by plasma-promoted dry etching, especially plasma etching or reactive ion etching. The substrate is made from quartz or silicon.