PROCESS FOR FABRICATION OF HIGH REFLECTORS BY REVERSAL OF LAYER SEQUENCE AND APPLICATION THEREOF
摘要
<p>An optical reflector includes an optical reflective element that comprises alternating layers of high and low index layers. A new substrate is bonded on the optical reflective element. The sequence of layers in the reflective element is reversed in order such that the layers grown first with lowest surface roughness are exposed to the highest electric field strength, and the layer grown last, of highest roughness, are buried deep in the multilayer stack.</p>
申请公布号
WO2005019881(A1)
申请公布日期
2005.03.03
申请号
WO2004US26087
申请日期
2004.08.12
申请人
MASSACHUSETTS INSTITUTE OF TECHNOLOGY;GRAWERT, FELIX, JAN;AKIYAMA, SHOJI;WADA, KAZUMI;KAERTNER, FRANZ, X.