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发明名称
HOLDING DEVICE
摘要
申请公布号
EP1042787(B1)
申请公布日期
2005.03.02
申请号
EP19980955299
申请日期
1998.12.01
申请人
UNAXIS BALZERS AKTIENGESELLSCHAFT
发明人
STAUSS, PETER;KERSCHBAUMER, JOERG
分类号
H01L21/683;H01L21/687;(IPC1-7):H01L21/00
主分类号
H01L21/683
代理机构
代理人
主权项
地址
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