| 摘要 |
<p>An apparatus for performing operations on at least one surface of an electronic substrate (10) having a first surface and a second surface includes a frame, a transportation system that moves the substrate (10) through the apparatus, a substrate support system, coupled to the frame, having a non-rigid portion that contacts and supports the substrate (10) during an operation on the substrate (10), wherein the non-rigid portion allows flexure of the substrate (10) before and during the performance of an operation on the substrate (10), and a device coupled to the frame that performs an operation on a surface of the substrate (10).</p> |
