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发明名称
Improvements to showerheads
摘要
申请公布号
GB0501776(D0)
申请公布日期
2005.03.02
申请号
GB20050001776
申请日期
2003.07.16
申请人
TRIKON TECHNOLOGIES LIMITED
发明人
分类号
H01L21/3065;C23C16/44;C23C16/455;H01J37/32
主分类号
H01L21/3065
代理机构
代理人
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