Process for producing master carrier for magnetic transfer

摘要

A process for producing a master carrier (M) contains steps of: forming a desired pattern on a support (G1) to form a resist pattern support (R1); forming a first ferromagnetic thin film (F1) on the resist pattern support by a vacuum film forming method; forming a third ferromagnetic thick film (F3) on the first ferromagnetic thin film by an electroplating; and peeling the support (G1') from the resist pattern support (R1) provided with the first ferromagnetic thin film (F1) and the third ferromagnetic thick film (F3).