Device is for alignment of optical component in a continuously active process in six degrees of freedom with sub-nanometer resolution

摘要

The device (8) is for alignment of an optical component in a continuously active process in six degrees of freedom with sub-nanometer resolution. Each optical component is supported and positioned by three identical supports via a common intermediate component, each support having two movement directions. Each support makes possible two vertically imposed movements. The two movements in each support are measured by a number of capacitative sensors in the support. The three supports secure the intermediate components at three fixture points, which together form an equilateral triangle.