发明名称 Probe construction using a recess
摘要 A method of constructing a probe which includes providing a substrate and creating a first substantially asymmetrical recess within the substrate. A conductive material is located within the recess and a conductive trace is electrically connected with the conductive material. A membrane supports the conductive trace, wherein the conductive material is located between the membrane and the substrate. The substrate is removed from the conductive material.
申请公布号 US6860009(B2) 申请公布日期 2005.03.01
申请号 US20010814584 申请日期 2001.03.22
申请人 CASCADE MICROTECH, INC. 发明人 GLEASON REED;BAYNE MICHAEL A.;SMITH KENNETH;LESHER TIMOTHY;KOXXY MARTIN
分类号 H01R13/24;H01R43/16;(IPC1-7):H01R43/16 主分类号 H01R13/24
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