发明名称 |
Semiconductor optical modulator, mach-zehnder optical modulator employing the same, and method of manufacturing semiconductor optical modulator |
摘要 |
A semiconductor optical modulator, a Mach-Zehnder optical modulator employing the same, and a method of manufacturing a semiconductor optical modulator that are suitable for high-speed baseband communication are provided. An optical waveguide core layer is formed in such a manner that it alternately crosses micro optical modulator elements and gap regions, which are formed by placing electrically insulating material at predetermined intervals on an electrically conductive substrate. The core layer is connected to a signal electrode portion via a conductive semiconductor portion in each micro optical modulator element. A ground electrode is connected to the core layer via the conductive substrate. Further, the signal electrode portions are connected in a series to form a signal electrode by means of in-between metal wirings. Conductive semiconductor material is located between the core layer and the electrodes. In the gap regions, the core layer is sandwiched between insulating semiconductor layers.
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申请公布号 |
US6862124(B2) |
申请公布日期 |
2005.03.01 |
申请号 |
US20020314969 |
申请日期 |
2002.12.10 |
申请人 |
FUJITSU LIMITED |
发明人 |
AKIYAMA SUGURU;SODA HARUHISA |
分类号 |
G02F1/017;G02F1/025;G02F1/225;H01S5/026;(IPC1-7):G02F1/03;G02F1/035 |
主分类号 |
G02F1/017 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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