发明名称 Method of fabricating a narrow projection such as a write pole extending from a substrate
摘要 An article is formed as a substrate having a projection extending outwardly therefrom. The article may be a magnetic recording head and the projection a write pole. The projection has a width in a thinnest dimension measured parallel to a substrate surface of no more than about 0.3 micrometers and a height measured perpendicular to the substrate of not less than about 5 times the width. The article is fabricated by forming an overlying structure on the substrate with an edge thereon, depositing a replication layer lying on the edge, depositing a filler onto the edge and the substrate, so that the filler, the replication layer, and the overlying structure in combination comprise a continuous layer on the substrate, selectively removing at least a portion of the replication layer from a free surface of the continuous layer inwardly toward the substrate, to form a defined cavity, and depositing a projection material into the defined cavity to form the projection.
申请公布号 US6859998(B2) 申请公布日期 2005.03.01
申请号 US20020121989 申请日期 2002.04.12
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 KRUGER JAMES;WANG BENJAMIN L.;WEBB PATRICK R.;ZOLLA HOWARD G.
分类号 G11B5/187;G11B5/31;(IPC1-7):G11B5/187;B44C1/22;C23C14/04 主分类号 G11B5/187
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