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发明名称
ZONE POLISHING USING VARIABLE SLURRY SOLID CONTENT
摘要
申请公布号
SG108953(A1)
申请公布日期
2005.02.28
申请号
SG20040004275
申请日期
2004.07.09
申请人
CHARTERED SEMICONDUCTOR MANUFACTURING LTD
发明人
ALVARO MAURY;JOVIN LIM;NACE LAYADI;SEBASTIAN QUEK
分类号
B24B37/04;B24B57/02
主分类号
B24B37/04
代理机构
代理人
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地址
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