METHOD OF MEASURING AUTOMATICALLY POSITION OF MAIN LAMP OF SEMICONDUCTOR TO MAINTAIN OPTIMUM STATE OF LAMP AND IMPROVE THROUGHPUT

摘要

PURPOSE: A method of measuring automatically a position of a main lamp of a semiconductor is provided to maintain an optimum state of a lamp and improve a throughput by measuring automatically a maximum power position of the lamp. CONSTITUTION: An automatic lamp position calculation tool program is installed in tool software. The power is measured in a measuring step pitch by using a power measurement sensor. The measured value is compared with a predetermined value corresponding to a lower power limit. A maximum power position on an x-axis and a y-axis is determined by the comparing process. An updating process is performed by using the determined value.