| 摘要 |
PURPOSE: An injection valve of a chemical supplying apparatus and the chemical supplying apparatus are provided to prevent a conglomeration of liquid material in a chemical injecting tube by uniformly heating the chemical injecting tube. CONSTITUTION: An injection valve of a chemical supplying apparatus converts a liquid material to vapors, supplies chemicals to be used in a CVD(Chemical Vapor Deposition) operation, and includes a body portion, a heater(403), and an auxiliary heater. The body portion includes a chemical injecting tube therein. The heater is implemented on more than one sidewall of the body portion and heats the body portion. The auxiliary heater is implemented on one side of the chemical injecting tube penetrating the body and heats the chemical injecting tube.
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