APPARATUS OF MONITORING STATE OF SUBSTRATE TRANSFER MODULE FOR PREVENTING CONTAMINATION OF SEMICONDUCTOR SUBSTRATE

摘要

PURPOSE: An apparatus of monitoring a state of a substrate transfer module is provided to prevent contamination of a semiconductor substrate by monitoring an internal state of a substrate transfer chamber. CONSTITUTION: A substrate transfer module(110) includes a transfer robot for transferring substrates from a storage vessel to a substrate processing module, a substrate transfer chamber for providing a substrate transfer space, and a sensing unit for measuring internal environment variables of the substrate transfer chamber. A monitoring unit(140) is connected to at least one substrate transfer module, determines the internal environment variables of the substrate transfer chamber by comparing the measured environment variables with the reference values, generates an alarm signal according to a determined result, and controls an operation of the substrate transfer module according to the alarm signal.