CARRIER SENSING DEVICE OF SEMICONDUCTOR PRODUCTION SYSTEM TO PREVENT DAMAGE OF WAFER

摘要

PURPOSE: A carrier sensing device of a semiconductor production system is provided to prevent damage of a wafer by using an optical sensor for detecting a loading state of a carrier on a table. CONSTITUTION: A carrier sensing device of a semiconductor production system includes a carrier(10) for storing wafers and a table on which a carrier is loaded. The carrier sensing device further includes a plurality of light-emitting sensors(22a,22b). The carrier sensing device further includes a plurality of light-receiving sensors(24a,24b) for outputting carrier sensing signals according to output signals of the light-emitting sensors. A carrier sensing signal transfer unit transfers the carrier sensing signals to a controller.