BEAM HOMOGENIZER, LASER IRRADIATION APPARATUS, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, ESPECIALLY CAPABLE OF CORRECTING VARIATION OF LASER BEAM INTENSITY

摘要

PURPOSE: A beam homogenizer, a laser irradiation apparatus and a method for manufacturing a semiconductor device are provided to improve irradiation intensity of laser beam. CONSTITUTION: According to the beam homogenizer, an optical element system divides a laser beam into a fixed direction and then synthesizes the divided laser beam. The beam homogenizer further includes an optical element system dividing the laser beam to a direction vertical to the above direction. And a light waveguide(103) makes uniform intensity distribution of the laser beam to the fixed direction. The light waveguide has a pair of reflective planes facing with each other.