ЭЛЕКТРОЕМКОСТНЫЙ ЗОНДОВЫЙ СПОСОБ ОПРЕДЕЛЕНИЯ ЭЛЕКТРОФИЗИЧЕСКИХ ПАРАМЕТРОВ СЛОЕВ НА ПРОВОДЯЩЕЙ ПОДЛОЖКЕ

摘要

FIELD: measurement technology. ^ SUBSTANCE: electrostatic charge is formed onto surface of layer and density of charge is measured at different moments of time. Charge is formed in local area to have preset thickness. Value of electrostatic charge q1 and q2 are measured for two known distances to surface of layer h1 and h2. At one the distances the measurements are performed at different moments of time. Relative dielectric permeability of layer epsilon and its conductivity gamma are determined by means of calculation. ^ EFFECT: widened functional capabilities.