METHOD FOR FORMING SILICONE OXIDE FILM WITH SPIN-ON GLASS

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a silicone oxide film by hardening a film with spin-on glass by using an oxidizer solution. SOLUTION: The silicone oxide film is formed by the following method. The spin-on glass film including polysilazane is hardened by using the oxidizer solution and converted to the silicone oxide film by applying heat treatment one or more times in a process for manufacturing a semiconductor device. COPYRIGHT: (C)2005,JPO&NCIPI