| 摘要 |
PROBLEM TO BE SOLVED: To incline a sample around two axes orthogonally crossing each other, and to observe both the front and rear of the sample. SOLUTION: The sample holder comprises an external cylinder internal end frame 11a provided at the internal end of a holder external cylinder 11; a first inclination body 28 that is supported by the external cylinder internal end frame 11a and can be inclined around a first inclination axis L1 extended in the Y-axis direction; a second inclination body 29 that is arranged at an internal end side as compared with the first inclination axis L1, is supported by the external cylinder internal end frame 11a, and can be inclined around a second inclination axis L2 extended in the Y-axis direction; and a sample table support shaft 49 that is rotatably supported around an axis vertical to the second inclination axis L2 by the second inclination body 29, and supports sample tables 51, 59 at the internal end. Additionally, the sample holder has a movable shaft 12 that penetrates the inside of the holder external cylinder 11 and is slidably and rotatably supported by the holder external cylinder 11 and a connecting member 46 for rotation that can rotate the sample table supporting shaft 49 by 180°or higher when the movable axis 12 is rotated and can be bent. COPYRIGHT: (C)2005,JPO&NCIPI
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