| 摘要 |
PROBLEM TO BE SOLVED: To provide a combustion chamber pressure sensor which satisfies a demand of a series of solutions relevant to a cost, an operability, a life and a measurement accuracy, by improving a type in which a sensor diaphragm 7 is enclosed at an end of a pressure sensor 1 at the side of a high pressure loaded chamber, wherein the pressure sensor is used for a detection of the pressure of the high pressure loaded chamber and a detected signal by the pressure sensor 1 is supplied to an evaluation electronics 16. SOLUTION: The sensor diaphragm 7 is composed of a steel diaphragm. A metal thin film layer 8 which encloses a measurement element of a piezo electric resistive type is mounted behind the steel diaphragm side 7.2. The metal thin film layer 8 is connected to the evaluation electronics 16 through a transfer element 11 which is contacted with the metal thin film. COPYRIGHT: (C)2005,JPO&NCIPI
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