发明名称 Semiconductor integrated circuit device
摘要 A semiconductor integrated circuit device realizing high integration and a simplified manufacturing process. The circuit includes a gate insulator with a first film thickness, a first N-channel MOSFET and a first P-channel MOSFET, in which a polysilicon layer consists of a gate electrode including an N-type impurity dose, and a gate insulator with a second film thickness thinner than the first film thickness. The circuit also includes a second N-channel MOSFET and a second P-channel MOSFET in which the polysilicon layers are doped with N-type impurity and P-type impurity, respectively. Gate electrodes of said first N-channel MOSFET and first P-channel MOSFET are formed as one body and connected to each other.
申请公布号 US2005035411(A1) 申请公布日期 2005.02.17
申请号 US20040866991 申请日期 2004.06.15
申请人 HITACHI, LTD. 发明人 HASEGAWA MASATOSHI;MORI KAZUTAKA;HOKARI TOMOFUMI
分类号 H01L21/822;G11C5/06;G11C7/18;G11C11/408;G11C11/4097;H01L21/8238;H01L21/8242;H01L21/8247;H01L27/02;H01L27/04;H01L27/092;H01L27/10;H01L27/108;H01L27/115;(IPC1-7):H01L29/76 主分类号 H01L21/822
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