发明名称 |
Carrier head with a flexible membrane |
摘要 |
A carrier head for a chemical mechanical polishing apparatus is described. The carrier head has a base, a rigid body, a membrane and a pressurizing structure. The rigid body is movable relative to the base and includes a downwardly-extending projection. The membrane has a mounting surface for a substrate. The membrane extends below the base to provide a chamber between the base and the membrane. The pressurizing structure applies a downward pressure on the rigid body to cause a lower surface of the rigid body to press on an inner surface of the membrane.
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申请公布号 |
US2005037698(A1) |
申请公布日期 |
2005.02.17 |
申请号 |
US20040946186 |
申请日期 |
2004.09.20 |
申请人 |
APPLIED MATERIALS, INC. A DELAWARE CORPORATION |
发明人 |
ZUNIGA STEVEN M.;BIRANG MANOOCHER;CHEN HUNG;KO SEN-HOU |
分类号 |
B24B37/00;B24B37/04;B24B37/30;B24B37/32;B24B41/06;B24B49/16;H01L21/304;(IPC1-7):B24B1/00 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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