发明名称 SYSTEM AND METHOD FOR STORING AND SUPPLYING FLUID
摘要 PROBLEM TO BE SOLVED: To provide an improved fluid storage and supply system having great advantages in cost, usability and performance to selectively supply a gas. SOLUTION: This fluid storage and supply system 10 includes a container 12 for keeping the fluid 17 under a desired pressure. The container has a pressure regulator 26 determined at a specific pressure. The regulator may be positioned at any of inside and outside, may have a single stage or multiple stages, and related to a port of the container. A supply assembly includes a flow rate control means such as a valve 20, and is constituted to circulate the gas/steam between the supply assembly and the regulator 26. When the valve is opened, the gas/steam is supplied from the container 12. The fluid in the container may be composed of the fluid sealed in the container under the pressure over its liquefaction pressure under a normal temperature condition such as an environmental temperature (room temperature). COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005042924(A) 申请公布日期 2005.02.17
申请号 JP20040266918 申请日期 2004.09.14
申请人 ADVANCED TECHNOLOGY MATERIALS INC 发明人 WANG LUPING;TOM GLENN
分类号 C23C14/24;C23C16/448;F17C1/00;F17C7/00;F17C7/02;F17C7/04;F17C9/02;F17C11/00;F17C13/00;F17C13/02;F17C13/04;H01L21/205;H01L21/265;H01L21/306;(IPC1-7):F17C7/00 主分类号 C23C14/24
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